Nanoscale Standards
نویسندگان
چکیده
منابع مشابه
Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition
The pitch accuracy of a grating formed by laser-focused atomic deposition is evaluated from the point of view of fabricating nanoscale pitch standard artifacts. The average pitch obtained by the process, nominally half the laser wavelength, is simply traceable with small uncertainty to an atomic frequency and hence can be known with very high accuracy. An error budget is presented for a Cr on s...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2014
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.80.642